This system employs a hyperspectrometer, which is comprised of a high-speed, low-noise camera and tunable filter to inspect dimensionally wafer’s color, color difference and surface reflectance.

● CCD Camera 
CCD Format: 1024*1024 Imaging Pixels 
● Tunable Filter 
Bandwidth: 6nm or 7nm 
Aperture: 20mm 
Wavelength: 400-700nm, 800-1700nm
● HMTOptics Operation Software