Spin-Coater

• 详细介绍
• 详细参数

• 详细介绍

  Our high quality, all NPP POLOS single wafer spin coaters are designed for

  Designed for R&D and low-volume production in the fields of MEMS, semiconductors, PV, microfluidics, and more. Suitable for all typical spin coating

  Process: cleaning, rinsing/drying, coating, developing and etching.

  
  

  These market-proven models are ideal for handling a wide variety of substrates from small chips with diameters of 2.5mm to 160mm/260mm or square samples with dimensions of 100x100mm or 150x150mm. System includes clear cover with syringe holder

  
  

  Diameters up to 300 mm. The units are operated via an easy-to-use, detachable color touchscreen that provides intuitive programming and recipe storage. Various nozzles, supersonic cleaning and dispensing lines can be optionally added. All spin coaters come standard with clips

  head. The standard unit is NPP material and the PTFE unit is PTFE.

  
  

  The SPIN150i is suitable for substrates up to 150mm long and includes the free vacuum suction cup A-V36 and segment adapter D-V10.

  
  

  SPIN Spin Coater Specifications

  Programmable CW and CCW and agitation rotation Automatic safety lid lock with sensor interlock

  Speed 0 rpm - 12,000 rpm, accuracy +/- 0.1 rpm

  Acceleration/Deceleration 1 - 30,000 rpm/sec, selectable per step

  
  

  POLOS Advanced Series Specifications

  Automatic safety lid lock with sensor interlock for automatic sequential or parallel chemical dispensing

  
  

  Up to 6 nozzles, each independently programmable

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• 产品特色

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• 详细介绍

  AutoCal系统提供在线的机器人校准方案，旨在快速和自动地保证机械设备的工作性能。因用于机器人各方面应用且与大多数机器人类型兼容，AutoCal系统可以检测出机器人自身构造和工具中心点（TCP）的 突然改变或偏离，并且该系统无需人为干涉就自动地更正这些误差。这意味着不用猜测哪里会出错，不用浪费宝贵时间在机器人程序重复校准上，产品品质无任何损失。

  AutoCal系统-Dynalog的先进水平校准技术，Dynalog是机器人单元标定技术的世界领导者。它的主流产品DynaCal 系统，被应用于离线的机器人单元校准，并作为最精确的和技术先进的机器人校准程序为许多机器人制造商和终端使用者所接受。AutoCal 系统将已证实的DynaCal校准技术结合到一个在线的全自动系统中，该系统专为程序控制和复原而设计的，价格低廉。